Highly Anisotropic Fluorine‐Based Plasma Etching of Ultralow Expansion Glass-Reference-Cited by-同舟云学术

Highly Anisotropic Fluorine‐Based Plasma Etching of Ultralow Expansion Glass

Published:2021-03-11 Issue: Volume: Page:2001336
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv. Eng. Mater.

Author:

Weigel Christoph¹^ORCID,Phi Hai Binh¹,Denissel Felix Arthur¹,Hoffmann Martin²,Sinzinger Stefan³^ORCID,Strehle Steffen¹^ORCID

Affiliation:

1. Institute of Micro- and Nanotechnologies MacroNano® Microsystems Technology Group Technische Universität Ilmenau Max-Planck-Ring 12 Ilmenau 98693 Germany

2. Chair of Microsystems Technology Ruhr University Bochum Universitätsstraße 150 Bochum 44801 Germany

3. Institute of Micro- and Nanotechnologies MacroNano® Fachgebiet Technische Optik Technische Universität Ilmenau Helmholtzring 1 Ilmenau 98693 Germany

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.202001336

Reference37 articles.

1. Delayed elastic effects in the glass ceramics Zerodur and ULE at room temperature

2. Effect of thermal cycling on dimensional stability of Zerodur and ULE

3. ULE®Glass with Improved Thermal Properties for EUVL Masks and Projection Optics Substrates

4. Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nonthermal plasma technologies for advanced functional material processing and current applications: Opportunities and challenges;Journal of Environmental Chemical Engineering;2024-10

2. Review of Plasma Surface Engineering Technology Toward Sustainable Textile Materials;Materials Circular Economy;2024-05-15

3. Experimental Study of Flow Boiling Regimes Occurring in a Microfluidic T-Junction;Micromachines;2023-12-13

4. Wet Chemical and Plasma Etching of Photosensitive Glass;Solids;2023-08-21

5. A paradigm change: Focused Electron Beam Nanostructuring of Glass;2023-07-13