Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology-Reference-Cited by-同舟云学术

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Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

Published:2016-07-04 Issue:3 Volume:4 Page:034004
ISSN:2051-672X
Container-title:Surface Topography: Metrology and Properties
language:
Short-container-title:Surf. Topogr.: Metrol. Prop.

Author:

Jäger G,Manske E,Hausotte T,Müller A,Balzer F

Funder

Thüringer Ministerium für Bildung, Wissenschaft und Kultur

Deutsche Forschungsgemeinschaft

Publisher

IOP Publishing

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation

Link

http://stacks.iop.org/2051-672X/4/i=3/a=034004/pdf

Reference15 articles.

1. Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers

2. Tactile 3D microprobe system with exchangeable styli

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