1. High-Frequency High-Voltage Device and Integrated Circuits R&D Center Institute of Microelectronic Chinese Academy of Sciences Beijing 100029 China
2. Key Laboratory of Microelectronic Devices and Integrated Technology Institute of Microelectronic Chinese Academy of Sciences Beijing 100029 China
3. State Key Laboratory of Functional Material for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China