Highly accurate SNR measurement using the covariance of two SEM images with the identical view
Author:
Affiliation:
1. Department of Information Design; Faculty of Informatics; Kogakuin University; Tokyo Japan
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.20279/fullpdf
Reference10 articles.
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2. An automatic focusing and astigmatism correction system the SEM and CTEM;Erasmus;J Microsc,1982
3. SMART-A program to measure SEM resolution and imaging performance;Joy;J Microsc,2002
4. Proper acquisition and handling of SEM images using a high-performance personal computer;Oho;Scanning,1996
5. New generation scanning electron microscopy technology based on the concept of active image processing;Oho;Scanning,1997
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