Support system for fine focusing and astigmatism correction using an auditory signal in scanning electron microscopy
Author:
Affiliation:
1. Department of Electrical Engineering, Faculty of Engineering, Kogakuin University, 2665-1 Nakano-machi, Hachioji, Tokyo 192-0015, Japan
2. Engineering Division, Canon Software Inc., 2-4-11 Higashishinagawa, Shinagawa, Tokyo, 140-8526, Japan
Publisher
Oxford University Press (OUP)
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Structural Biology
Link
http://academic.oup.com/jmicro/article-pdf/66/3/187/26059080/dfx007.pdf
Reference18 articles.
1. Practical methods for digital image enhancement in SEM;Oho;J. Electron Microsc.,1994
2. On-line computation of diffractograms for the analysis of SEM images;Erasmus;Scanning,1980
3. A robust focusing and astigmatism correction method for the scanning electron microscope, part III: an improved technique;Ong;Scanning,1998
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