Subject
Biomaterials,Biotechnology,General Materials Science,General Chemistry
Reference51 articles.
1. Semiconductor Fabtech, Issue No. 3, Henley Publishing, London, 1995, pp. 177-183.
2. Economic and technical case for ion projection lithography
3. SEMATECH 2004, “International Technology Roadmap for Semiconductors” in http://public.itrs.net/Files/2003ITRS/Home2003.htm.
4. Recent contributions to the development of non-optical lithography
5. An overview of ion beam lithography for nanofabrication
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