Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. D. Friedrich and M. Niazmand, ADEQUAT II, First half year report, work package 2.
2. Fabrication of electrode arrays for biotechnical applications;Reimer;Sensors and Actuators A,1995
3. Low energy lithography; Energy control and variable energy exposure;Brünger;Microelectronic Engineering,1995
4. Proximity correction for direct write e-beam lithography;Knapek;Microelectronic Engineering,1991
5. Nanostructure patterning with SOR X-Ray lithography;Chlebek;Microelectronic Engineering,1994
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