Economic and technical case for ion projection lithography
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Published:1998-07
Issue:4
Volume:16
Page:2444
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
8 articles.
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1. Lithographic Resists;Encyclopedia of Polymer Science and Technology;2012-11-16
2. Recent Developments in Nanofabrication Using Ion Projection Lithography;Small;2005-06
3. Simulation of the energy absorption and the resist development at sub-150nm ion lithography;Microelectronic Engineering;2005-03
4. Lithographic Resists;Encyclopedia of Polymer Science and Technology;2002-07-15
5. Highly charged ions;Journal of Physics B: Atomic, Molecular and Optical Physics;2001-09-25