Determination in Situ of Chemical Solvent Vapors in a Semiconductor Workplace with an Open Path FTIR Spectrometer
Author:
Publisher
Wiley
Subject
General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/jccs.199400097/fullpdf
Reference14 articles.
1. Fourier Transform Infrared (FTIR) Spectroscopy for Monitoring Semiconductor Process Gas Emissions
2. Evaluation of the Applicability of Fourier Transform Infrared (FTIR) Spectroscopy for Quantitation of the Components of Airborne Solvent Vapors in Air
3. The Limits of Detection for the Monitoring of Semiconductor Manufacturing Gas and Vapor Emissions by Fourier Transform Infrared (FTIR) Spectroscopy
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