The Limits of Detection for the Monitoring of Semiconductor Manufacturing Gas and Vapor Emissions by Fourier Transform Infrared (FTIR) Spectroscopy-Reference-Cited by-同舟云学术

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The Limits of Detection for the Monitoring of Semiconductor Manufacturing Gas and Vapor Emissions by Fourier Transform Infrared (FTIR) Spectroscopy

Published:1989-02 Issue:2 Volume:50 Page:78-84
ISSN:0002-8894
Container-title:American Industrial Hygiene Association Journal
language:en
Short-container-title:American Industrial Hygiene Association Journal

Author:

STRANG CHRISTOPHER R.¹²,LEVINE STEVEN P.²

Affiliation:

1. a AT&T Bell Laboratories, 555 Union Boulevard, Allentown, PA 18103 and The University of Michigan, School of Public Health, Ann Arbor, MI 48109

2. b The University of Michigan, School of Public Health, Ann Arbor, MI 48109

Publisher

Informa UK Limited

Subject

Public Health, Environmental and Occupational Health

Link

https://www.tandfonline.com/doi/pdf/10.1080/15298668991374336

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Environmental Monitoring;Sensors;2008-03-20

2. Open-Path Fourier Transform Infrared Spectroscopy;Handbook of Vibrational Spectroscopy;2006-08-15

3. Real‐Time Monitoring of Transport of Chlorinated Hydrocarbons from Industrial Areas Using Open‐Path FTIR Spectrometry with COL1SB;Spectroscopy Letters;2005-05

4. An Evaluation of Fourier Transform Infrared (FTIR) Spectroscopy for Detecting Organic Solvents in Expired Breath;Applied Occupational and Environmental Hygiene;2003-03

5. Field Evaluation of a Transportable Open-Path FTIR Spectrometer for Real-Time Air Monitoring;Applied Occupational and Environmental Hygiene;2002-02

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