Fourier Transform Infrared (FTIR) Spectroscopy for Monitoring Semiconductor Process Gas Emissions
Author:
Publisher
Informa UK Limited
Subject
Public Health, Environmental and Occupational Health
Link
http://www.tandfonline.com/doi/pdf/10.1080/08828032.1986.10390478
Reference14 articles.
1. U.S. DHHS (NIOSH) Report 115–12b;Ungers L. J.,1984
2. U.S. DHHS (NIOSH) Report 115–16b;Ungers L. J.,1984
3. U.S. DHHS (NIOSH) Report 115–20b;Ungers L. J.,1984
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1. Field Evaluation of a Transportable Open-Path FTIR Spectrometer for Real-Time Air Monitoring;Applied Occupational and Environmental Hygiene;2002-02
2. Spectroscopic Techniques in Industrial Hygiene;Encyclopedia of Analytical Chemistry;2000-10-30
3. Industrial Hygiene;Semiconductor Safety Handbook;1998
4. The Quantitative Analysis of Multicomponent Gaseous Mixtures of Organic Compounds by FT-IR;Spectroscopy Letters;1997-01
5. Industrial Hygiene Monitoring;Semiconductor Industrial Hygiene Handbook;1995
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