Copper precipitation in long-time diffused silicon
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference6 articles.
1. Precipitation of copper in silicon
2. On the interaction between crystal defects and impurities in silicon investigated by electron microscopic methods
3. Precipitation in High‐Purity Silicon Single Crystals
4. Transmission electron microscope investigation of the growth of copper precipitate colonies in silicon
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electrical Activity of Iron and Copper in Si, SiGe and Ge;Metal Impurities in Silicon- and Germanium-Based Technologies;2018
2. Characterization of Metallic Precipitates in Epitaxial Si by Means of Preferential Etching and TEM;Journal of The Electrochemical Society;1984-06-01
3. New morphological types of CuSi precipitates in silicon and their electrical effects;Physica Status Solidi (a);1983-08-16
4. Copper precipitation in long-time processed transistor samples;Crystal Research and Technology;1983
5. Precipitation of Copper in Transmutation Doped Silicon;MRS Proceedings;1983
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