Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO-Reference-Cited by-同舟云学术

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Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO

Published:2019-07-29 Issue:11 Volume:16 Page:1900044
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Garofano Vincent¹^ORCID,Bérard Remy²³,Glad Xavier¹,Joblin Christine³^ORCID,Makasheva Kremena²^ORCID,Stafford Luc¹^ORCID

Affiliation:

1. Département de physiqueUniversité de Montréal, MontréalQuébec Canada

2. LAPLACE (Laboratoire Plasma et Conversion d'Energie), CNRS, UPS, INPTUniversité de ToulouseToulouse France

3. Institut de Recherche en Astrophysique et Planétologie (IRAP), CNRS, UPS, CNESUniversité de ToulouseToulouse France

Funder

FP7 Ideas: European Research Council

Natural Sciences and Engineering Research Council of Canada

Université de Montréal

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201900044

Reference58 articles.

1. Atmospheric pressure plasma deposition of thin films by Townsend dielectric barrier discharge

2. Deposition of protective coatings in rf organosilicon discharges

3. Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas

4. Plasma deposition of optical films and coatings: A review

5. Chemical Vapor Deposition Enhanced by Atmospheric Pressure Non-thermal Non-equilibrium Plasmas

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1. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy;Plasma Sources Science and Technology;2024-07-01

2. Layer-by-layer structured nanocomposite deposits from plasma-synthesized organosilicon nanoparticles and organosilicon nanoparticles decorated with Ag nanoparticles by taking advantage of cyclic nanoparticle formation in Ar/HMDSO reactive plasmas;Frontiers in Nanotechnology;2024-04-11

3. Recent Progress in Cellulose Hydrophobization by Gaseous Plasma Treatments;Polymers;2024-03-12

4. Simulation study of organosilicon coating of a spherical nanoparticle immersed in a low-pressure HMDSO/O₂ plasma;Physica Scripta;2023-11-30

5. Direct Liquid Reactor-Injector of Nanoparticles: A Safer-by-Design Aerosol Injection for Nanocomposite Thin-Film Deposition Adapted to Various Plasma-Assisted Processes;Coatings;2023-03-16

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