Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy

Abstract

Abstract Misty plasmas have recently emerged as a promising tool for nanocomposite thin films deposition. However, aerosol-plasma interactions remain poorly documented, especially at low working pressure. In this work, optical emission spectroscopy is used to probe the temporal evolution of three fundamental plasma parameters during pulsed liquid injection in an inductively coupled argon plasma at low-pressure. Time-resolved values of metastable argon density, electron temperature, and electron density are determined from radiation trapping analysis and particle balance equations of selected argon 1s and 2p levels. Pulsed liquid injection is found to induce a sudden drop in metastable density and electron temperature, and an increase in electron density. These results are attributed to the lower ionization thresholds of the injected molecular species compared to the one of argon. In addition, upstream liquid temperature is found to affect the transitory kinetics for non-volatile solvents more than volatile ones, in accordance with a previously reported flash boiling atomization mechanism.