Generation of Uniform Large-Area VHF Plasmas by Launching a Traveling Wave
Author:
Affiliation:
1. Physics Division; Institute of Nuclear Energy Research (INER); Longtan, Taoyuan County 32546 R.O.C. Taiwan
2. Department of Engineering and System Science; National Tsing Hua University; 101, Section 2, Kuang-Fu Road Hsinchu 30013 R.O.C. Taiwan
Funder
National Science Council of Taiwan
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201300101/fullpdf
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1. Towards very low-cost mass production of thin-film silicon photovoltaic (PV) solar modules on glass
2. Control of large area VHF plasma produced at high pressure
3. Calculation of the electrode shape for suppression of the standing wave effect in large area rectangular capacitively coupled reactors
4. Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity
5. Development of large-area a-Si:H films deposition using controlled VHF plasma
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