Generation of uniform large-area very high frequency plasmas by launching two specific standing waves simultaneously
Author:
Affiliation:
1. Physics Division, Institute of Nuclear Energy Research (INER), Longtan, Taoyuan County 32546, Taiwan
2. Department of Engineering and System Science, National Tsing Hua University, 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan
Funder
National Science Council Taiwan (NSC)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4895703
Reference42 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Sheath thickness in very-high-frequency plasma chemical vapor deposition of hydrogenated amorphous silicon
3. Analysis of high-rate a-Si:H deposition in a VHF plasma
4. Capacitively coupled glow discharges at frequencies above 13.56 MHz
5. Very high frequency capacitively coupled discharges for large area processing
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