How to address the issue of uniformity in large area capacitively coupled plasmas? A modeling investigation
Author:
Funder
Fundamental Research Funds for the Central Universities
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/1361-6595/ab9350/pdf
Reference53 articles.
1. Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar
2. Ion flux nonuniformities in large-area high-frequency capacitive discharges
3. Capacitively coupled glow discharges at frequencies above 13.56 MHz
4. Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge
5. Standing wave and skin effects in large-area, high-frequency capacitive discharges
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