Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial-Reference-Cited by-同舟云学术

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Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial

Published:2016-09-23 Issue:1-2 Volume:14 Page:1600152
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Economou Demetre J.¹

Affiliation:

1. Plasma Processing LaboratoryDepartment of Chemical and Biomolecular EngineeringUniversity of HoustonHoustonTexas 77204

Funder

National Science Foundation

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201600152

Reference75 articles.

1. Particle and fluid simulations of low-temperature plasma discharges: benchmarks and kinetic effects

2. Modeling and simulation of plasma etching reactors for microelectronics

3. Low-pressure gas discharge modelling

4. Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor

5. The Fluid-Kinetic Particle-in-Cell method for plasma simulations

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4. A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O₂ mixtures;Plasma Sources Science and Technology;2024-01-01

5. Influence of Voltage and Duration of Plasma Pyrolysis of 1,1,2,2-Tetrachloroethane in the Liquid Phase by the Action of Low-Voltage Discharges;High Energy Chemistry;2023-11-30

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