Pulsed DC Sputtering of Highly c ‐Axis AlN Film on Top of Si (111) Substrate-Reference-Cited by-同舟云学术

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Pulsed DC Sputtering of Highly c ‐Axis AlN Film on Top of Si (111) Substrate

Published:2021-04-14 Issue:6 Volume:258 Page:2000549
ISSN:0370-1972
Container-title:physica status solidi (b)
language:en
Short-container-title:Phys. Status Solidi B

Author:

Iqbal Abid¹²,Walker Glenn¹,Hold Leonie¹,Fernandes Alanna³,Iacopi Alan¹,Mohd-Yasin Faisal¹^ORCID

Affiliation:

1. Queensland Micro- and Nanotechnology Centre Griffith University Nathan QLD 4111 Australia

2. Department of Electrical Engineering University of Engineering and Technology Peshawar KPK Pakistan

3. Bluglass Ltd 74 Asquith Street Silverwater NSW 2128 Australia

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssb.202000549

Reference32 articles.

1. Aluminum nitride homoepitaxial growth on polar and non-polar AlN PVT substrates by high temperature CVD (HTCVD)

2. Epitaxial piezoelectric MEMS on silicon

3. Epitaxial growth of AlN on sapphire (0001) by sputtering: a structural, morphological and optical study

4. Growth kinetics of AlN and GaN films grown by molecular beam epitaxy on R-plane sapphire substrates

5. Growth of epitaxial AlxGa1−xN films by pulsed laser deposition

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improving the structural performance of low-temperature sputtered AlN on silicon substrate;Semiconductor Science and Technology;2024-02-13

2. Effects of Different Nitrogen Flow Rates on Structure and Optical Characteristics in AlN Films by Reactive Magnetron Sputtering;2023-11-20

3. Crystalline and optical properties of AlN films with varying thicknesses (0.4-10 µm) grown on sapphire by metalorganic chemical vapor deposition;Thin Solid Films;2023-09

4. Influence of Pulsed DC Sputtering Power on the Quality and Residual Stress of AlN Films on Si (100) Substrates;Crystal Research and Technology;2022-02-27

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