Optical and Structural Properties of Amorphous Silicon Obtained by Low Pressure Chemical Vapour Deposition
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Proc. 2nd Winter European Course on Amorphous Silicon. Ed. TAKS (Ispra), 1989, and references therein.
2. Energy Resolved Mass Spectrometry of the a-Si:D Film Growth Species During DC Magnetron Sputtering
3. The Role of the Species Formed in Pecvd Systems on the Density of States of a-Si:H Films
4. Vibrational Spectra of Hydrogen in Silicon and Germanium
5. Effect of hydrogen content on the light induced defect generation in direct current magnetron reactively sputtered hydrogenated amorphous silicon thin films
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of the hydrogen dilution on the short-range and intermediate-range-order in radiofrequency magnetron sputtered hydrogenated amorphous silicon films;The European Physical Journal Applied Physics;2004-06-25
2. High Quality P-Doped μc-Si:H Films as Obtained by low Temperature Lpcvd of Disilane;MRS Proceedings;1992
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