Nitrogen Incorporation into Hard Amorphous Carbon Films Obtained by RF Plasma Decomposition of CH4-N2 Gas Mixtures
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. , and , in: New Diamond Science and Technology, Ed. , , and , Materials Research Society, Pittsburgh 1991 (p. 11).
2. Hard amorphous (diamond-like) carbons
3. The deposition and study of hard carbon films
4. Gas evolution from hydrogenated amorphous carbon films
5. Prediction of New Low Compressibility Solids
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