Accurate Quantification of Si/SiGe Interface Profiles via Atom Probe Tomography
Author:
Affiliation:
1. Oak Ridge National Laboratory; Oak Ridge TN 37831 USA
2. HRL Laboratories, LLC; 3011 Malibu Canyon Rd. Malibu CA 90265 USA
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
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1. Strained p-Channel FinFETs With Extended $\Pi$-Shaped Silicon–Germanium Source and Drain Stressors
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4. Coherent singlet-triplet oscillations in a silicon-based double quantum dot
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