Photocatalytic Lithography with Atomic Layer–Deposited TiO 2 Films to Tailor Biointerface Properties
Author:
Affiliation:
1. Department of Solid State SciencesGhent University Krijgslaan 281/S1 9000 Gent Belgium
2. Interuniversity Micro Electronics Center (IMEC) Kapeldreef 75 3001 Heverlee Belgium
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.201900035
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