Modeling of dielectric charging in RF MEMS capacitive switches-Reference-Cited by-同舟云学术

Modeling of dielectric charging in RF MEMS capacitive switches

Published:2007 Issue:12 Volume:49 Page:3188-3192
ISSN:0895-2477
Container-title:Microwave and Optical Technology Letters
language:en
Short-container-title:Microw. Opt. Technol. Lett.

Author:

Sumant Prasad S.,Cangellaris Andreas C.,Aluru Narayana R.

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP

2. , , , , , , and , Lifetime characterization of capacitive RF MEMS switches, IEEE MTT-S Int Microwave Symp Dig, Phoenix, AZ (2001), 227–230.

3. Physics of semiconductor devices, Wiley, New York, 1969.

4. , , , , and , Initial observation and analysis of dielectric charging effects on RF MEMS capacitive switches, IEEE MTT-S Int Microwave Symp Dig, Forth Worth, TX (2004), 1943–1946.

5. , , and , Modeling and characterization of dielectric charging effects in RF MEMS capacitive switches, IEEE MTT-S Int Microwave Symp Dig, Long Beach, CA (2005), 753–756.

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