Modeling, design, and simulation of a radio frequency microelectromechanical system capacitive shunt switch

Author:

Jmai Bassem1ORCID,Anacleto Pedro2,Mendes Paulo2,Gharsallah Ali1

Affiliation:

1. Department of Physics, Unit of Research in High Frequency Electronic Circuits and Systems, Faculty of Sciences, Tunis; El Manar University Tunisia; Tunis Tunisia

2. Department of Industrial Electronics, Microelectromechanical Systems Research Unit; University of Minho; Guimarães Portugal

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Computer Science Applications,Modeling and Simulation

Reference21 articles.

1. Modeling of dielectric charging in RF MEMS capacitive switches;Sumant;Microw Opt Technol Lett,2007

2. Conception of a tunable analog reflection-type phase shifter based on capacitive RF MEMS for radar application;Jmai;Int J Microw Opt Technol,2016

3. Goldsmith. Acceleration of dielectric charging in RF MEMS capacitive switches;Yuan;IEEE Trans Device Mater Reliab,2006

4. Electromechanical model of RF MEMS switches;Zhang;Microsyst Technol,2003

5. Increasing capacitance and self-resonant frequency of the MEMS switched capacitor using high-κ TiO2 and SU-8 bridged beam structure;Choi;J. Microelectromech Syst,2015

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