Determination of interface locations and layer thicknesses in SIMS and AES depth profiling of Si/Ti multilayer films by 50 at% definition-Reference-Cited by-同舟云学术

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Determination of interface locations and layer thicknesses in SIMS and AES depth profiling of Si/Ti multilayer films by 50 at% definition

Published:2014-02-14 Issue:S1 Volume:46 Page:272-275
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Hwang Hye Hyun¹,Jang Jong Shik¹²,Kang Hee Jae²,Kim Kyung Joong¹

Affiliation:

1. Division of Industrial Metrology; Korea Research Institute of Standards and Science; 267 Gajeon-ro, Yuseong-gu Daejeon 305-600 Korea

2. Department of Physics; Chungbuk National University; 410 Seongbong-ro Heungdeok-gu Cheongju 361-763 Korea

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference9 articles.

1. Significant improvement in depth resolution of Cr/Ni interfaces by secondary ion mass spectrometry profiling under normal O2+ion bombardment

2. Surface roughness-induced artifacts in secondary ion mass spectrometry depth profiling and a simple technique to smooth the surface

3. Accurate Quantification of H, Li, Be, B, F, Ba, REE, Y, Th, and U in Complex Matrixes: A Combined Approach Based on SIMS and Single-Crystal Structure Refinement

4. Reduction of secondary ion mass spectrometry matrix effect for high dose chromium and cobalt implanted silicon

5. GaAs delta-doped layers in Si for evaluation of SIMS depth resolution GaAs

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preferential sputtering effects in depth profiling of multilayers with SIMS, XPS and AES;Applied Surface Science;2019-07

2. Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling;Surface and Interface Analysis;2017-07-27

3. Atomic spectrometry update. Review of advances in the analysis of metals, chemicals and functional materials;Journal of Analytical Atomic Spectrometry;2015

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