Silicon Resonant Microsensors
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Publisher
John Wiley & Sons, Inc.
Reference47 articles.
1. M. A. Schmidt R. T. Howe Resonant Structures for Integrated Sensors Technical Digest 1986
2. Resonator Sensors-a Review;Langdon;J. Phys. E., Sci. Instrum.,1985
3. Sensors with Oscillating Elements;Gast;J. Phys. E., Instrum.,1985
4. Precise Measurement of Small Forces;Zulliger;Sensors and Actuators,1983
5. A Batch-fabricated Silicon Accelerometer;Roylance;IEEE Trans. on Electron Devices,1979
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