A Comparative Study of the Mechanical and Tribological Properties of Thin Al 2 O 3 Coatings Fabricated by Atomic Layer Deposition and Radio Frequency Sputtering-Reference-Cited by-同舟云学术

A Comparative Study of the Mechanical and Tribological Properties of Thin Al 2 O 3 Coatings Fabricated by Atomic Layer Deposition and Radio Frequency Sputtering

Published:2021-11-12 Issue:1 Volume:219 Page:2100398
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Grilli Maria Luisa¹^ORCID,Valerini Daniele²,Rizzo Antonella²,Yilmaz Mehmet³,Song Chen⁴,Hu Guohang⁴,Mikhaylov Alexey⁵,Chierchia Rosa¹,Rinaldi Antonio¹

Affiliation:

1. ENEA - Italian National Agency for New Technologies, Energy and Sustainable Economic Development Casaccia Research Centre Via Anguillarese 301 Roma 00123 Italy

2. ENEA - Italian National Agency for New Technologies, Energy and Sustainable Economic Development Brindisi Research Centre S.S. 7 Appia - km 706 Brindisi 72100 Italy

3. Department of Science Teaching K. K. Education Faculty Atatürk University Atatürk Üniversitesi Rektörlüğü Erzurum 25240 Turkey

4. Key Laboratory of Materials for High Power Laser Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Qinghe Road 390, Jiading District Shanghai 201800 China

5. Analytical Center for Financial Research Financial Research Institute of the Ministry of Finance of the Russian Federation Nastasinsky Lane, 3, bld. 2 Moscow 127006 Russia

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202100398

Reference51 articles.

1. Corrosion and wear behavior of alumina coatings obtained by various methods

2. Effect of sintering temperatures on corrosion and wear properties of sol–gel alumina coatings on surface pre-treated mild steel

3. Critical Raw Materials Saving by Protective Coatings under Extreme Conditions: A Review of Last Trends in Alloys and Coatings for Aerospace Engine Applications

4. Tunneling Atomic Layer-Deposited Aluminum Oxide: a Correlated Structural/Electrical Performance Study for the Surface Passivation of Silicon Junctions

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancing Internal and External Stability of Perovskite Solar Cells Through Polystyrene Modification of the Perovskite and Rapid Open‐Air Deposition of ZnO/AlO_x Nanolaminate Encapsulation;Solar RRL;2024-07

2. Enhancing Surgical Tool Performance with Alumina-Based Coatings: An Engineering Analysis;Sci;2024-04-19

3. Cold spraying of Al-5Si/Al2O3 composite coatings on AZ31 Mg alloy: Microstructure, adhesion strength, and tribological properties;Surface and Coatings Technology;2024-03

4. Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition;Journal of Vacuum Science & Technology A;2022-12

5. Infrared Spectroscopy Studies of Aluminum Oxide and Metallic Aluminum Powders, Part I: Thermal Dehydration and Decomposition;Powders;2022-03-10