Impact of Deposition Temperature on Crystal Structure and Ferroelectric Properties of (Al 1− x Sc x )N Films Prepared by Sputtering Method-Reference-Cited by-同舟云学术

Impact of Deposition Temperature on Crystal Structure and Ferroelectric Properties of (Al 1− x Sc x )N Films Prepared by Sputtering Method

Published:2021-07-18 Issue:17 Volume:218 Page:2100302
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Yasuoka Shinnosuke¹,Shimizu Takao¹²³,Tateyama Akinori¹,Uehara Masato⁴,Yamada Hiroshi⁴,Akiyama Morito⁴,Funakubo Hiroshi¹⁵^ORCID

Affiliation:

1. Department of Materials Science and Engineering Tokyo Institute of Technology Yokohama 226-8502 Japan

2. Research Center for Functional Materials National Institute for Materials Science Tsukuba 305-0044 Japan

3. PRESTO Japan Science and Technology Agency 4-1-8 Honcho, Kawaguchi-shi Saitama 332-0012 Japan

4. Sensing System Research Center National Institute of Advanced Industrial Science and Technology (AIST) Tosu 841-0052 Japan

5. Materials Research Center for Element Strategy Tokyo Institute of Technology Yokohama 226-8502 Japan

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202100302

Reference31 articles.

1. Materials for high temperature acoustic and vibration sensors: A review

2. Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

3. Piezoelectric materials for high power, high temperature applications

4. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

5. Ferroelectricity in wurtzite structure simple chalcogenide

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High stability of the ferroelectricity against hydrogen gas in (Al,Sc)N thin films;Applied Physics Letters;2024-07-15

2. Enhanced ferroelectric and piezoelectric properties of SrBi2Ta2O9 thin films through crystalline orientation;Solid State Sciences;2024-07

3. New-Generation Ferroelectric AlScN Materials;Nano-Micro Letters;2024-06-25

4. Dawn of nitride ferroelectric semiconductors: from materials to devices;Semiconductor Science and Technology;2023-03-06

5. Ferroelectric nitride semiconductors: Molecular beam epitaxy, properties, and emerging device applications;Semiconductors and Semimetals;2023