1. Key Lab of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China
2. Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China
3. School of Microelectronics University of Chinese Academy of Sciences Beijing 100049 China
4. Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices Beijing 100083 China
5. State Key Laboratory of Crystal Materials Shandong University Jinan 250100 China
6. State Key Laboratory of Integrated Optoelectronics Institute of semiconductors Chinese Academy of Sciences Beijing 100083 China