1. Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Str. 25 52074 Aachen Germany
2. ASML Netherlands B.V. De Run 6501, DR Veldhoven 5504 The Netherlands
3. AMO GmbH Advanced Microelectronic Center Aachen (AMICA) Otto‐Blumenthal‐Str. 25 52074 Aachen Germany