Software acceleration techniques for the simulation of scanning electron microscope images
Author:
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950250508/fullpdf
Reference34 articles.
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5. Davidson MP Vladar AE An inverse scattering approach to SEM line width measurements SPIE Conference on Metrology, Inspection, and Process Control for Microlithography XIII 640 649 1999
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