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Signal formation of backscattered electrons by microinhomogeneities and surface relief in a SEM

  • Published:1991 Issue:1 Volume:13 Page:15-22
  • ISSN:0161-0457
  • Container-title:Scanning
  • language:en
  • Short-container-title:Scanning

Author:

Aristov V. V.,Dreomova N. N.,Firsova A. A.,Kazmiruk V. V.,Samsonovich A. V.,Ushakov N. G.,Zaitsev S. I.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference14 articles.

1. Backscattering of electrons;Archard;J Appl Phys,1961

2. SEM observation of three-dimensional microinhomogeneities (in Russian);Aristov;DAN SSSR,1988

3. Scanning electron microscopy in submicron structural diagnostics;Aristov;Vacuum,1988

4. Calculation of the signal of backscattered electrons using a diffusion matrix from Monte Carlo calculations;Desai;Scanning,1990

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1. Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2017-03

2. Investigation of secondary-emission signal formation in the low-voltage SEM mode;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2016-09

3. Developing a technique for detecting signals for electron-optical in situ monitoring of periodic structures;Bulletin of the Russian Academy of Sciences: Physics;2011-09

4. Determination of limiting parameters of multiple-beam electron-optical systems for diagnostics of semiconductor structures;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2009-10

5. Economic approximate models for backscattered electrons;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
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