Calculation of the signal of backscattered electrons using a diffusion matrix from Monte Carlo calculations-Reference-Cited by-同舟云学术

Calculation of the signal of backscattered electrons using a diffusion matrix from Monte Carlo calculations

Published:1990-01 Issue:1 Volume:12 Page:1-4
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Desai V.,Reimer L.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950120102/fullpdf

Reference22 articles.

1. Backscattering of electrons;Archard;J Appl Phys,1961

2. Reconstruction of true surface-topographies in SEM using backscattered electrons;Carlsen;Scanning,1985

3. Rückstreukoeffizient und Sekundärelektronenausbeute von 10-100 keV Elektronen und Beziehungen zur Rasterelektronenmikroskopie;Drescher;Z Angew Phys

4. Backscattered electron multidetector system for improved quantitative topographic contrast;Hejna;Scanning,1987

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Economic approximate models for backscattered electrons;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007

2. Simulation of imaging in projection microscope using multibeam probe;SPIE Proceedings;2002-07-01

3. Fast new simulation of x-ray signals for arbitrary geometries;Proceedings, annual meeting, Electron Microscopy Society of America;1992-08

4. Fabrication of Hollow High Aspect Ratio Metal Microstructure Arrays;MRS Proceedings;1992

5. A new high-speed simulation method for electron-beam critical dimension metrology profile modeling;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11