A study of BSE signals of double layers on substrates at various detector take-off angles

Author:

Hejna J.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference14 articles.

1. Theoretical prediction of the electron back-scattering coefficient for multilayer structures;August;J Micro sc,1990

2. Multiple scattering of 5-30 keV electrons in evaporated metal films. II: Range-energy relations;Cosslett;Br J Appl Phys,1964

3. A ring scintillation detector for detection of backscattered electrons in the scanning electron microscope;Hejna;Scan Microsc,1987

4. Elektronenrückstreumessungen an dünnen Schichten auf massiven Tragersubstanzen;Hohn;Optik,1976

5. A study of electron backscattering of thin films on substrates;Hunger;Scanning,1986

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