Two-dimensional simulation and modeling in scanning electron microscope imaging and metrology research
Author:
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference14 articles.
1. An inverse scattering approach to SEM line width measurements;Davidson;Proc SPIE,1999
2. Monte Carlo simulation of charging effects in linewidth metrology (II) on insulator substrate;Ko;Scanning,1998
3. Monte Carlo simulation of charging effects during observation of trench structures by scanning electron microscope;Ko;Scanning,1998
4. Application of Monte Carlo simulations to critical dimension metrology in a scanning electron microscope;Lowney;Scan Microsc,1996a
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