Nanomanufacturing concerns about measurements made in the SEM Part V: dealing with noise-Reference-Cited by-同舟云学术

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Nanomanufacturing concerns about measurements made in the SEM Part V: dealing with noise

Published:2016-09-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Postek Michael T.¹,Vladár András E.¹

Affiliation:

1. National Institute of Standards and Technology (United States)

Publisher

SPIE

Reference21 articles.

1. Does Your SEM Really Tell the Truth? How would you know? Part 1;Postek,2013

2. Nanomanufacturing Concerns about Measurements made in the SEM Part III: Vibration and Drift;Postek,2014

3. Nanomanufacturing Concerns about Measurements made in the SEM Part IV: Charging;Postek,2014

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20–450 eV;ACS Applied Materials & Interfaces;2023-07-14

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