Electron-beam test system for high-speed devices
Author:
Funder
EEC's Esprit Program
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950090504/fullpdf
Reference19 articles.
1. Electron beam testing: methods and applications;Feuerbaum;Scanning,1983
2. Waveform measurements on gigahertz semiconductor devices by scanning electron microscope stroboscopy;Fujioka;Appl Phys Lett,1981
3. Analysis of the transit time effect on the stroboscopic voltage contrast in the scanning electron microscope;Fujioka;J Phys D: Appl Phys,1985
4. Magnetic field extraction of secondary electrons for accurate integrated circuit voltage measurement;Garth;J Vac Sci Techn,1986
5. Goerlich S Kessler P Plies E Planar and spherical retarding field spectrometers for electron beam testing: evaluation and comparison First European Conference on Electron and Optical Beam Testing of Integrated Circuits 1987
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