Magnetic field extraction of secondary electrons for accurate integrated circuit voltage measurement
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron Optics of Low-Voltage Electron Beam Testing and Inspection. Part I: Simulation Tools ✶ ✶Reprinted from Advances in Optical and Electron Microscopy, vol. 13, 1994, 123–242.;Advances in Imaging and Electron Physics;2018
2. Low-voltage probe forming columns for electrons;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1995-09
3. Voltage measurements using the time-of-flight electron spectrometer;Microelectronic Engineering;1994-03
4. Voltage measurements on integrated circuits using a time-of-flight electron spectrometer;Microelectronic Engineering;1994-01
5. Time-of-flight electron spectrometer for voltage measurements on integrated circuits;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-11
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