Calculation of energy spectra from layered structures for backscattered electron spectrometry and relations to rutherford backscattering spectrometry by ions-Reference-Cited by-同舟云学术

Calculation of energy spectra from layered structures for backscattered electron spectrometry and relations to rutherford backscattering spectrometry by ions

Published:1991 Issue:6 Volume:13 Page:381-391
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Reimer L.,Böngeler R.,Kässens M.,Liebscher F. F.,Senkel R.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950130602/fullpdf

Reference36 articles.

1. SEM in submicron structural diagnostics;Aristov;Vacuum,1988

2. Scanning electron microscopy in diagnostics of microelectronic structures (in Russian);Aristov;Electronnaya promyshlenmost,1990

3. Signal formation of backscattered electrons by microinhomogeneities and surface relief in a SEM;Aristov;Scanning,1991

4. Messungen zur Energieverteilung von Rückstreuelektronen an polykristallinen Festkörpern;Bauer;Exp Technik Physik,1979

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