Influence of the angular distribution of backscattered electrons on signals at different take-off angles in low-voltage scanning electron microscopy (LVSEM)-Reference-Cited by-同舟云学术

Influence of the angular distribution of backscattered electrons on signals at different take-off angles in low-voltage scanning electron microscopy (LVSEM)

Published:1995-03 Issue:2 Volume:17 Page:97-105
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Spranck M.,Kässens M.,Reimer L.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950170206/fullpdf

Reference23 articles.

1. Electron-specimen interactions in low-voltage scanning electron microscopy;Böngeler;Scanning,1993

2. Calculations of Mott scattering cross sections;Czyzewski;J Appl Phys,1990

3. Backscattering of 0.5-10 keV electrons from solid targets;Darlington;J Phys D,1972

4. Angular distribution of elastically reflected electrons from Au;Ding;Phys Stat Sol (b),1990

5. Rückstreukoeffizient und Sekundärelek-tronenausbeute von 10-100 keV Elektronen und Beziehungen zur Raster-Elektronenmikroskopie;Drescher;Zangew Phys,1970

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1. Diffraction effects and inelastic electron transport in angle-resolved microscopic imaging applications;Journal of Microscopy;2017-05-05

2. Energy spectra and angular distributions of charged particles backscattered from solid targets;Journal of Physics D: Applied Physics;2008-02-14

3. Emission of Backscattered and Secondary Electrons;Springer Series in Optical Sciences;1998

4. A computer program to illustrate macro topography on electron backscattering;Scanning;1996-09