Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling-Reference-Cited by-同舟云学术

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Published:2019-03-13 Issue:5 Volume:5 Page:1800776
ISSN:2199-160X
Container-title:Advanced Electronic Materials
language:en
Short-container-title:Adv. Electron. Mater.

Author:

Parsapour Fazel¹,Pashchenko Vladimir¹,Kurz Nicolas²,Sandu Cosmin Silviu¹³,LaGrange Thomas⁴,Yamashita Kaoru⁵,Lebedev Vadim⁶,Muralt Paul¹^ORCID

Affiliation:

1. Electroceramic Thin Films GroupEcole Polytechnique Fédérale de Lausanne EPFL 1015 Lausanne Switzerland

2. Department of Microsystems Engineering–IMTEK University of Freiburg 79108 Freiburg Germany

3. Department of PhysicsUniversity of Craiova 200585 Craiova Romania

4. Interdisciplinary Centre for Electron MicroscopyEcole Polytechnique Fédérale de Lausanne EPFL 1015 Lausanne Switzerland

5. Faculty of Electrical Engineering and ElectronicsKyoto Institute of Technology 606‐8585 Kyoto Japan

6. Fraunhofer Institute for Applied Solid State Physics IAF 79108 Freiburg Germany

Funder

Kommission für Technologie und Innovation

Publisher

Wiley

Subject

Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/aelm.201800776

Reference58 articles.

1. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

2. Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

3. Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

4. Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

5. Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

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