Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems-Reference-Cited by-同舟云学术

Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems

Published:2017-06-06 Issue:8 Volume:3 Page:1700077
ISSN:2199-160X
Container-title:Advanced Electronic Materials
language:en
Short-container-title:Adv. Electron. Mater.

Author:

Song Enming¹²^ORCID,Fang Hui³,Jin Xin⁴,Zhao Jianing²,Jiang Chunsheng⁴,Yu Ki Jun⁵,Zhong Yiding²,Xu Dong²,Li Jinghua²,Fang Guanhua²,Du Haina²,Zhang Jize²,Park Jeong Min⁶,Huang Yonggang⁷,Alam Muhammad A.⁴,Mei Yongfeng¹,Rogers John A.⁸⁹¹⁰

Affiliation:

1. Department of Materials Science Fudan University Shanghai 200433 P. R. China

2. Frederick Seitz Materials Research Laboratory Department of Materials Science and Engineering University of Illinois at Urbana‐Champaign Urbana IL 61801 USA

3. Department of Electrical and Computer Engineering Northeastern University Boston MA 02115 USA

4. School of Electrical and Computer Engineering Purdue University West Lafayette IN 47907 USA

5. School of Electrical and Electronic Engineering Yonsei University Seoul 03722 Republic of Korea

6. Department of Physics Duke University Durham NC 27708 USA

7. Department of Mechanical Engineering Civil and Environmental Engineering and Materials Science and Engineering Northwestern University Evanston IL 60208 USA

8. Departments of Materials Science and Engineering Biomedical Engineering Neurological Surgery Chemistry Mechanical Engineering Electrical Engineering and Computer Science Northwestern University Evanston IL 60208 USA

9. Center for Bio‐Integrated Electronics Northwestern University Evanston IL 60208 USA

10. Simpson Querrey Institute for Nano/Biotechnology Northwestern University Evanston IL 60208 USA

Funder

Defense Advanced Research Projects Agency

National Science Foundation

Publisher

Wiley

Subject

Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/aelm.201700077

Reference41 articles.