3D‐Printed Scanning‐Probe Microscopes with Integrated Optical Actuation and Read‐Out-Reference-Cited by-同舟云学术

3D‐Printed Scanning‐Probe Microscopes with Integrated Optical Actuation and Read‐Out

Published:2019-12-05 Issue:2 Volume:16 Page:1904695
ISSN:1613-6810
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language:en
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Author:

Dietrich Philipp‐Immanuel¹²³,Göring Gerald⁴⁵,Trappen Mareike¹²⁶,Blaicher Matthias¹²,Freude Wolfgang²,Schimmel Thomas⁴⁵,Hölscher Hendrik¹^ORCID,Koos Christian¹²³⁶

Affiliation:

1. Institute for Microstructure Technology (IMT)Karlsruhe Institute of Technology (KIT) Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany

2. Institute of Photonics and Quantum Electronics (IPQ)Karlsruhe Institute of Technology (KIT) Engesserstraße 5 76131 Karlsruhe Germany

3. Vanguard Photonics GmbH Gablonzer Straße 10 76185 Karlsruhe Germany

4. Institute of Applied Physics (APH)Karlsruhe Institute of Technology (KIT) Wolfgang‐Gaede‐Straße 1 76131 Karlsruhe Germany

5. Institute of Nanotechnology (INT)Karlsruhe Institute of Technology (KIT) Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany

6. 3DMM2O ‐ Cluster of Excellence(EXC‐2082/1 – 390761711)Karlsruhe Institute of Technology (KIT) Engesserstraße 5 76131 Karlsruhe Germany

Funder

Deutsche Forschungsgemeinschaft

European Research Council

Alfried Krupp von Bohlen und Halbach-Stiftung

Publisher

Wiley

Subject