1. National Laboratory of Solid‐State Microstructures School of Physics Collaborative Innovation Center of Advanced Microstructures Nanjing University Nanjing 210093 China
2. State Key Laboratory of Infrared Physics Shanghai Institute of Technical Physics Chinese Academy of Sciences Shanghai 200083 China
3. SEU‐FEI Nano‐Pico Center Key Laboratory of MEMS of Ministry of Education Southeast University Nanjing 210096 China
4. State Key Laboratory of Superlattices and Microstructures Institute of Semiconductors College of Materials Science and Opto‐Electronic Technology Chinese Academy of Sciences Beijing 100083 China
5. School of Electronic Science and Technology Nanjing University Nanjing 210093 China
6. State Key Laboratory of Pollution Control and Resource Reuse School of the Environment Nanjing University Nanjing 210046 China