Direct Patterning of Piezoelectric Thin Films by Inkjet Printing
Author:
Affiliation:
1. Luxembourg Institute of Science and Technology; rue du Brill 41 4422 Belvaux Luxembourg
2. Jožef Stefan Institute; Jamova cesta 39 1000 Ljubljana Slovenia
Funder
Fonds National de la Recherche Luxembourg
Javna Agencija za Raziskovalno Dejavnost RS
Publisher
Wiley
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/admt.201800168/fullpdf
Reference36 articles.
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3. Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning
4. A low voltage silicon micro-pump based on piezoelectric thin films
5. S.-Y. Oh S.-K. Wee M.-J. Song US8038263B2 2011
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