Crystallographic Tilt in Aluminum Gallium Nitride Epilayers Grown on Miscut Aluminum Nitride Substrates
Author:
Affiliation:
1. Department of Materials Science and Engineering North Carolina State University Raleigh NC 27695-7919 USA
2. Adroit Materials, Inc. 2054 Kildaire Farm Road Cary NC 27518 USA
Funder
National Science Foundation
Army Research Laboratory
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssr.202200323
Reference21 articles.
1. Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges
2. Status of the growth and fabrication of AlGaN-based UV laser diodes for near and mid-UV wavelength
3. The structure of dislocations in (In,Al,Ga)N wurtzite films grown epitaxially on (0001) or (112¯2) GaN or AlN substrates
4. AlGaN devices and growth of device structures
5. Pseudomorphic growth of thick Al0.6Ga0.4N epilayers on AlN substrates
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