Subject
General Engineering,Energy Engineering and Power Technology,Materials Science (miscellaneous),General Chemical Engineering,Environmental Engineering,General Computer Science
Cited by
3 articles.
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1. Study of the linewidth measurement with scanning electron microscope based on laser interference principle;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics;2019-01-24
2. Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process;Applied Thermal Engineering;2016-09
3. The Passing of an Era;Engineering;2016-06