Faster Region-based Hotspot Detection
Author:
Affiliation:
1. Chinese University of Hong Kong
2. Dalian University of Technology
3. Fudan University
Publisher
ACM
Link
https://dl.acm.org/doi/pdf/10.1145/3316781.3317824
Reference26 articles.
1. W.-Y. Wen J.-C. Li S.-Y. Lin J.-Y. Chen and S.-C. Chang "A fuzzy-matching model with grid reduction for lithography hotspot detection " IEEE TCAD vol. 33 no. 11 2014. W.-Y. Wen J.-C. Li S.-Y. Lin J.-Y. Chen and S.-C. Chang "A fuzzy-matching model with grid reduction for lithography hotspot detection " IEEE TCAD vol. 33 no. 11 2014.
2. Accurate process-hotspot detection using critical design rule extraction
3. Predicting variability in nanoscale lithography processes
4. High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning
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