DiffPattern: Layout Pattern Generation via Discrete Diffusion-Reference-Cited by-同舟云学术

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DiffPattern: Layout Pattern Generation via Discrete Diffusion

Published:2023-07-09 Issue: Volume: Page:
ISSN:
Container-title:2023 60th ACM/IEEE Design Automation Conference (DAC)
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Author:

Wang Zixiao¹,Shen Yunheng²,Zhao Wenqian¹,Bai Yang¹,Chen Guojin¹,Farnia Farzan¹,Yu Bei¹

Affiliation:

1. Chinese University of Hong Kong

2. Tsinghua University

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10247654/10247655/10248009.pdf?arnumber=10248009

Reference17 articles.

1. Denoising diffusion implicit models;song;ICLRE,2020

2. Structured denoising diffusion models in discrete state-spaces;austin;NeurIPS,2021

3. Detecting multilayer layout hotspots with adaptive squish patterns;yang;DAC,2019

4. Denoising diffusion probabilistic models;ho;NeurIPS,2020

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1. AdaOPC 2.0: Enhanced Adaptive Mask Optimization Framework for via Layers;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2024-09

2. Open-source differentiable lithography imaging framework;DTCO and Computational Patterning III;2024-04-10

3. Machine Learning in EDA: When and How;2023 ACM/IEEE 5th Workshop on Machine Learning for CAD (MLCAD);2023-09-10

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